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Title:
IMPRINT DEVICE, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2018/088049
Kind Code:
A1
Abstract:
Provided is an imprint device that includes a mold holding unit that holds and moves a mold, and a substrate holding unit that has a plurality of suction regions in which a substrate is suctioned and that holds and moves the substrate. When releasing the mold, the imprint device makes the suction force in a suction region, of the plurality of suction regions, at a position at which the mold separates from an imprint material weaker than the suction force in a suction region closer to the outer peripheral side of the substrate than that position, moves at least one of the mold holding unit and the substrate holding unit by a prescribed amount such that the space between the mold and the substrate becomes larger, and then tilts the mold holding unit.

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Inventors:
YOSHIDA SETSUO (JP)
HASEGAWA NORIYASU (JP)
Application Number:
PCT/JP2017/034872
Publication Date:
May 17, 2018
Filing Date:
September 27, 2017
Export Citation:
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Assignee:
CANON KK (JP)
International Classes:
H01L21/027; B29C59/02
Foreign References:
JP2015111683A2015-06-18
JP2015012033A2015-01-19
JP2013162045A2013-08-19
JP2013098497A2013-05-20
JP2012134214A2012-07-12
JP2011100952A2011-05-19
JP2008529826A2008-08-07
Attorney, Agent or Firm:
OHTSUKA, Yasunori et al. (JP)
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