Title:
IMPRINT DEVICE AND IMPRINT METHOD
Document Type and Number:
WIPO Patent Application WO/2018/169201
Kind Code:
A1
Abstract:
The present invention relates to an imprint device and an imprint method. The imprint device comprises: a transfer part for transferring a film-shaped mold in one or another direction, the film-shaped mold having a pattern formed on the surface thereof; a surface modification part for plasma-treating the surface of the pattern transferred by the transfer part; a coupling part for coupling the mold to a substrate such that the plasma-treated pattern of the mold can be stamped on the substrate; and a separation part for separating the mold and the substrate which have been coupled to each other. In the present invention, the film-shaped mold having a pattern formed on the surface thereof is modified with plasma, the pattern is stamped on the substrate, and the substrate and the mold are separated from each other. Therefore, the present invention provides an advantageous effect in that surface modification of the pattern through plasma treatment allows the reuse of the pattern and the reduction of a time taken to print the pattern on a substrate, thereby improving printing performance.
Inventors:
GU JA BUNG (KR)
LEE NAM SIK (KR)
KOO HWANG SUB (KR)
KIM HYUN JE (KR)
JUNG HEE SEOK (KR)
LEE NAM SIK (KR)
KOO HWANG SUB (KR)
KIM HYUN JE (KR)
JUNG HEE SEOK (KR)
Application Number:
PCT/KR2018/001076
Publication Date:
September 20, 2018
Filing Date:
January 24, 2018
Export Citation:
Assignee:
GIGALANE CO LTD (KR)
International Classes:
G03F7/00; G03F7/20; G03F7/34; G03F9/00; H05H1/46
Foreign References:
| KR20120130246A | 2012-11-29 | |||
| JP2004148494A | 2004-05-27 | |||
| KR20140144716A | 2014-12-19 | |||
| KR20110098093A | 2011-09-01 | |||
| US20070204953A1 | 2007-09-06 |
Attorney, Agent or Firm:
B&IP-JOOWON PATENT AND LAW FIRM (KR)
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