Title:
IMPRINT DEVICE AND TEMPLATE
Document Type and Number:
WIPO Patent Application WO/2013/183263
Kind Code:
A1
Abstract:
An imprint device comprises: a template having a plate-like template body and a prescribed shape pattern formed on the surface of the template body; a template hold mechanism for holding the template; a substrate hold mechanism which can hold a substrate having a resin layer made of a light curing resin formed thereon while the pattern of the template and the resin layer are in contact with each other; and a light emission mechanism for radiating light having a wavelength range to cure the light curing resin. The template is configured to allow the light to enter from the side of the template body and the light emission mechanism emits the light into the side of the template body to irradiate the resin layer by allowing the light to transmit through the template body.
Inventors:
IWASAKI KENYA (JP)
FUSANO HIROAKI (JP)
HIROOKA TAKAAKI (JP)
NAGAO TAKESHI (JP)
NAKAYAMA HIROYUKI (JP)
FUSANO HIROAKI (JP)
HIROOKA TAKAAKI (JP)
NAGAO TAKESHI (JP)
NAKAYAMA HIROYUKI (JP)
Application Number:
PCT/JP2013/003423
Publication Date:
December 12, 2013
Filing Date:
May 30, 2013
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
B29C59/02; H01L21/027
Foreign References:
| JP2011071508A | 2011-04-07 | |||
| JP2009266901A | 2009-11-12 | |||
| JP2009181617A | 2009-08-13 | |||
| JP2005108351A | 2005-04-21 | |||
| JPH05297225A | 1993-11-12 |
Attorney, Agent or Firm:
SAKURA PATENT OFFICE, p. c. (JP)
Patent business corporation cherry tree international patent firm (JP)
Patent business corporation cherry tree international patent firm (JP)
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