IMPRINT DEVICE AND IMPRINT TRANSFER METHOD

WIPO Patent Application WO/2012/014869

A1

The present invention is an imprint device and a transfer method therefor, whereby recess and projection shapes present on the surface of a stamper are transferred to transfer-receiving object by irradiating the transfer-receiving object with energy, and the stamper is detached from the transfer-receiving object. The transfer process is carried out by: applying pressure to a first back side of the stamper and/or the transfer-receiving object with a flat pressure-applying object; applying pressure to a second back side of the stamper and/or transfer-receiving object with a fluid; and controlling the pressure applied by the flat pressure-applying object and the pressure applied by the fluid, and the timing that pressure is applied.

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SHIRAISHI Toshimitsu (1600 Kami, Kamisato-machi Kodama-gu, Saitama 95, 〒3690395, JP)
白石　敏光 (〒95 埼玉県児玉郡上里町嘉美１６００番地 Saitama, 〒3690395, JP)
YAMASHITA Naoaki (1600 Kami, Kamisato-machi Kodama-gu, Saitama 95, 〒3690395, JP)

JP2011/066918

February 02, 2012

July 26, 2011

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HITACHI HIGH-TECHNOLOGIES CORPORATION (24-14, Nishi-Shimbashi 1-chome Minato-k, Tokyo 17, 〒1058717, JP)
株式会社日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
SHIRAISHI Toshimitsu (1600 Kami, Kamisato-machi Kodama-gu, Saitama 95, 〒3690395, JP)
白石　敏光 (〒95 埼玉県児玉郡上里町嘉美１６００番地 Saitama, 〒3690395, JP)

H01L21/027; B29C59/02

POLAIRE I.P.C. (7-1 Hatchobori 2-chome, Chuo-ku Tokyo, 32, 〒1040032, JP)

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