Title:
IMPRINT DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/073388
Kind Code:
A1
Abstract:
An imprint device according to the present invention is provided with a supply device which, when a transfer of a recess portion formed in a mold 3 is performed by having a resist layer penetrate into the recess portion formed in the mold in an atmosphere of condensable gas that condenses at the temperature and pressure in the recess portion being sealed by the resist layer, supplies at a constant ratio a plurality of condensable gases having different saturated vapor pressures, using a first condensable gas tank 6 and an adjust valve 6a, and a second condensable gas tank 6 and an adjust valve 7a. In this way, it becomes possible to prevent resist filling failure due to capillary condensation, and to adjust the width or shape of pattern lines even when the same mold is used.
Inventors:
SUZUKI KENTA (JP)
YOUN SUNGWON (JP)
HIROSHIMA HIROSHI (JP)
YOUN SUNGWON (JP)
HIROSHIMA HIROSHI (JP)
Application Number:
PCT/JP2016/080671
Publication Date:
May 04, 2017
Filing Date:
October 17, 2016
Export Citation:
Assignee:
NAT INST ADVANCED IND SCIENCE & TECH (JP)
International Classes:
H01L21/027; B29C59/02
Foreign References:
| JP2013232452A | 2013-11-14 | |||
| JP2014078697A | 2014-05-01 | |||
| JP2004103817A | 2004-04-02 | |||
| JP2007142366A | 2007-06-07 |
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