Title:
IMPRINT METHOD, IMPRINT APPARATUS, AND ARTICLE MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2013/136733
Kind Code:
A1
Abstract:
The imprint method includes changing the position of a detector that detects an alignment mark formed on a shot on a substrate; bringing a pattern formed on a mold into contact with an imprint material supplied on the shot on the substrate; and detecting the alignment mark using the detector after completion of the change in the position of the detector. Here, the contacting is started prior to completion of the change in the position of the detector.
Inventors:
HAYASHI NOZOMU (JP)
Application Number:
PCT/JP2013/001446
Publication Date:
September 19, 2013
Filing Date:
March 07, 2013
Export Citation:
Assignee:
CANON KK (JP)
International Classes:
H01L21/027; B29C59/02
Foreign References:
| JP2006165371A | 2006-06-22 | |||
| JP2007165400A | 2007-06-28 | |||
| JP2010040879A | 2010-02-18 | |||
| JP2007281072A | 2007-10-25 | |||
| JP2008244441A | 2008-10-09 | |||
| JP2007281072A | 2007-10-25 | |||
| EP1669802A2 | 2006-06-14 |
Other References:
See also references of EP 2826059A4
Attorney, Agent or Firm:
TAKAOKA, Ryoichi (Ikebukuro Tosei Building 5th Floor, 5-4-7, Nishi-Ikebukuro, Toshima-k, Tokyo 21, JP)
Download PDF: