Title:
IMPRINT METHOD, IMPRINT DEVICE, MOLD MANUFACTURING METHOD, AND ARTICLE MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2019/163565
Kind Code:
A1
Abstract:
This imprint method comprises performing an imprint process for curing an imprint material over a shot region of a substrate in a state in which the imprint material and a pattern portion of a mold are in contact with each other. The imprint method comprises an adjusting step in which, in accordance with shape information indicating the shape of a surface of at least one of the shot region and the pattern portion in a thickness direction of the pattern portion in the above state, at least one of distortion of the shot region in a planar direction orthogonal to the thickness direction and distortion of the pattern portion in the planar direction is adjusted.
Inventors:
SEKI JUNICHI (JP)
Application Number:
PCT/JP2019/004625
Publication Date:
August 29, 2019
Filing Date:
February 08, 2019
Export Citation:
Assignee:
CANON KK (JP)
International Classes:
H01L21/027; B29C59/02
Foreign References:
| JP2017097056A | 2017-06-01 | |||
| JP2014225637A | 2014-12-04 | |||
| JP2013098291A | 2013-05-20 | |||
| JP2007242893A | 2007-09-20 | |||
| JP2010278041A | 2010-12-09 | |||
| JP2016103603A | 2016-06-02 | |||
| JP2017050428A | 2017-03-09 | |||
| JP2013089663A | 2013-05-13 |
Attorney, Agent or Firm:
OHTSUKA, Yasunori et al. (JP)
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