Title:
IMPRINT SYSTEM, IMPRINT METHOD, AND COMPUTER MEMORY MEDIUM
Document Type and Number:
WIPO Patent Application WO/2011/145607
Kind Code:
A1
Abstract:
Disclosed is an imprint system, comprising a substrate processing station for forming a first resist film on a substrate, an imprint processing station connected to the substrate processing station and provided with a plurality of imprint units for forming a second resist film on the substrate formed with the first resist film and transferring a transfer pattern onto the second resist film to form a predetermined resist pattern on the second resist film, a substrate transport station connected to the substrate processing station for transporting a substrate to/from the substrate processing station, and a template transporting station connected to the imprint processing station for transporting a template to/from the imprint processing station.
Inventors:
TERADA, Shoichi (1-1 Fukuhara, Koshi-sh, Kumamoto 16, 〒8611116, JP)
寺田 正一 (〒16 熊本県合志市福原１－１ 東京エレクトロン九州株式会社内 Kumamoto, 〒8611116, JP)
HIROSHIRO, Koukichi (1-1 Fukuhara, Koshi-sh, Kumamoto 16, 〒8611116, JP)
広城 幸吉 (〒16 熊本県合志市福原１－１ 東京エレクトロン九州株式会社内 Kumamoto, 〒8611116, JP)
寺田 正一 (〒16 熊本県合志市福原１－１ 東京エレクトロン九州株式会社内 Kumamoto, 〒8611116, JP)
HIROSHIRO, Koukichi (1-1 Fukuhara, Koshi-sh, Kumamoto 16, 〒8611116, JP)
広城 幸吉 (〒16 熊本県合志市福原１－１ 東京エレクトロン九州株式会社内 Kumamoto, 〒8611116, JP)
Application Number:
JP2011/061298
Publication Date:
November 24, 2011
Filing Date:
May 17, 2011
Export Citation:
Assignee:
TOKYO ELECTRON LIMITED (3-1 Akasaka 5-chome, Minato-ku Tokyo, 25, 〒1076325, JP)
東京エレクトロン株式会社 (〒25 東京都港区赤坂五丁目３番１号 Tokyo, 〒1076325, JP)
TERADA, Shoichi (1-1 Fukuhara, Koshi-sh, Kumamoto 16, 〒8611116, JP)
寺田 正一 (〒16 熊本県合志市福原１－１ 東京エレクトロン九州株式会社内 Kumamoto, 〒8611116, JP)
HIROSHIRO, Koukichi (1-1 Fukuhara, Koshi-sh, Kumamoto 16, 〒8611116, JP)
東京エレクトロン株式会社 (〒25 東京都港区赤坂五丁目３番１号 Tokyo, 〒1076325, JP)
TERADA, Shoichi (1-1 Fukuhara, Koshi-sh, Kumamoto 16, 〒8611116, JP)
寺田 正一 (〒16 熊本県合志市福原１－１ 東京エレクトロン九州株式会社内 Kumamoto, 〒8611116, JP)
HIROSHIRO, Koukichi (1-1 Fukuhara, Koshi-sh, Kumamoto 16, 〒8611116, JP)
International Classes:
B29C59/02; H01L21/027
Attorney, Agent or Firm:
KANEMOTO, Tetsuo et al. (Hazuki International, Kakubari Building1-20, Sumiyoshi-ch, Shinjuku-ku Tokyo 65, 〒1620065, JP)
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Claims: