Title:
IMPRINT TEMPLATE AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2016/051928
Kind Code:
A1
Abstract:
[Problem]
To provide a low-cost imprint template with which the trapping of air can be reduced in photocurable imprinting, and which has excellent transferability to a substrate having curvature, and to provide a method for manufacturing this imprint template.
[Solution]
A template used in UV nano-imprinting, said template characterized by having a flexible, light-transmitting fixed plate (1c), a transparent resin buffer layer (1b) formed on top of the fixed plate, and a resin film mold (1a) adhered in a removable manner to the top of the transparent resin buffer layer (1b), with one or a combination of a plurality of the resin film molds (1a) forming an irregular transfer pattern on the surface thereof.
Inventors:
OBATA TSUTOMU (JP)
YOKOYAMA YOSHIYUKI (JP)
NASUNO MASAAKI (JP)
KUCHIKI MIKIHARU (JP)
AONO TOMOSHI (JP)
KASHIWAGI MOTOFUMI (JP)
YOKOYAMA YOSHIYUKI (JP)
NASUNO MASAAKI (JP)
KUCHIKI MIKIHARU (JP)
AONO TOMOSHI (JP)
KASHIWAGI MOTOFUMI (JP)
Application Number:
PCT/JP2015/070392
Publication Date:
April 07, 2016
Filing Date:
July 16, 2015
Export Citation:
Assignee:
TOYAMA PREFECTURE (JP)
KYORITSU CHEMICAL & CO LTD (JP)
ZEON CORP (JP)
KYORITSU CHEMICAL & CO LTD (JP)
ZEON CORP (JP)
International Classes:
H01L21/027; B29C33/38; B29C59/02
Domestic Patent References:
| WO2010001538A1 | 2010-01-07 |
Foreign References:
| JP2012253236A | 2012-12-20 | |||
| JP2012169313A | 2012-09-06 | |||
| JP2008179034A | 2008-08-07 | |||
| JP2004039136A | 2004-02-05 | |||
| JP2013067084A | 2013-04-18 | |||
| JP2010030057A | 2010-02-12 |
Other References:
MARC VERSCHUUREN ET AL.: "3D Photonic Structures by Sol-Gel Imprint Lithography", MATERIALS RESEARCH SOCIETY SYMPOSIA PROCEEDINGS, vol. 1002, 17 March 2011 (2011-03-17)
TSUTOMU OBATA ET AL.: "Development of next-generation substrate technology for LED", REPORTS OF THE TOYAMA INDUSTRIAL TECHNOLOGY CENTER, 23 July 2014 (2014-07-23), pages 46 - 47
TSUTOMU OBATA ET AL.: "Development of next-generation substrate technology for LED", REPORTS OF THE TOYAMA INDUSTRIAL TECHNOLOGY CENTER, 23 July 2014 (2014-07-23), pages 46 - 47
Attorney, Agent or Firm:
OTANI Kaichi (JP)
Kaichi Otani (JP)
Kaichi Otani (JP)
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