IMPRINTING DEVICE AND IMPRINTING METHOD

Title:

IMPRINTING DEVICE AND IMPRINTING METHOD

Document Type and Number:

WIPO Patent Application WO/2013/077386

Kind Code:

A1

Abstract:

The purpose of the invention is to provide an imprinting device and an imprinting method with which the size of the device and the cost can be reduced. An imprinting device for transferring a molding pattern of a mold (1) to a substance being molded (2), the device being configured from: a case (33) that configures a controlled pressure chamber (30); a stage (32) that supports the mold (1) and the substance being molded (2); a frame (43) that surrounds the perimeter of the stage (32); a first movement means (not shown) capable of moving the case (33) relatively toward and away from the stage (32); a second movement means (46) capable of moving the case (33) relatively toward and away from the frame (43); a pressure-controlling means (35) for adjusting the pressure of the fluid in the controlled pressure chamber (30); and a pressure-reducing means (45) for reducing the pressure of a pressure reduction chamber (40) configured from the stage (32), the frame (43), and the mold (1) or the substance being molded (2), and removing the fluid between the mold (1) and the substance being molded (2).

Inventors:

KAWAGUCHI HIROSUKE (JP)
TANAKA SATORU (JP)

Application Number:

PCT/JP2012/080245

Publication Date:

May 30, 2013

Filing Date:

November 21, 2012

Export Citation:

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Assignee:

SCIVAX CORP (JP)

International Classes:

B29C59/02; H01L21/027

Domestic Patent References:

WO2012147958A1	2012-11-01
WO2004062886A1	2004-07-29

Foreign References:

JP2008221706A	2008-09-25
JP2010507230A	2010-03-04
JPH03280229A	1991-12-11
JP2006018977A	2006-01-19
JP2009154393A	2009-07-16

Other References: