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Title:
IMPRINTING MATERIAL WITH LOW DIELECTRIC CONSTANT
Document Type and Number:
WIPO Patent Application WO/2010/146983
Kind Code:
A1
Abstract:
Provided is an imprinting material that forms a low dielectric constant film with a high transmittance and a high refractive index. The imprinting material comprises a component (A), a component (B), and a component (C), and contains 50 to 95 parts by mass of component (A) and 5 to 50 parts by mass of component (B) each per a total of 100 parts by mass of the aforementioned component (A) and the aforementioned component (B). Component (A): a compound having a bis(aryl)fluorene skeleton, that is represented by the formula (1); component (B): a compound having at least one polymerizable group therein; component (C): a photopolymerization initiator (In the formula, R represents an acryloyl group, a (meta)acryloyl group, or a vinyl group; A represents an alkylene group; m and n both independently represent an integer in the range from 0 to 3.)

Inventors:
KOBAYASHI, Junpei (Ltd. Electronic Materials Research Laboratories 488-6, Suzumi-cho, Funabashi-sh, Chiba 52, 〒2740052, JP)
小林 淳平 (〒52 千葉県船橋市鈴身町488番地6 日産化学工業株式会社 電子材料研究所内 Chiba, 〒2740052, JP)
KATO, Taku (Electronic Materials Research Laboratories, 488-6 Suzumi-cho, Funabashi-sh, Chiba 52, 〒2740052, JP)
Application Number:
JP2010/059187
Publication Date:
December 23, 2010
Filing Date:
May 31, 2010
Export Citation:
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Assignee:
NISSAN CHEMICAL INDUSTRIES, LTD. (7-1 Kanda-Nishiki-cho 3-chome, Chiyoda-ku Tokyo, 54, 〒1010054, JP)
日産化学工業株式会社 (〒54 東京都千代田区神田錦町三丁目7番地1 Tokyo, 〒1010054, JP)
KOBAYASHI, Junpei (Ltd. Electronic Materials Research Laboratories 488-6, Suzumi-cho, Funabashi-sh, Chiba 52, 〒2740052, JP)
小林 淳平 (〒52 千葉県船橋市鈴身町488番地6 日産化学工業株式会社 電子材料研究所内 Chiba, 〒2740052, JP)
International Classes:
H01L21/027; B29C59/02; C08F2/50; H01L21/312; B29K33/04; B29L11/00; B29L31/34
Attorney, Agent or Firm:
HANABUSA, Tsuneo et al. (Shin-Ochanomizu Urban Trinity 2, Kandasurugadai 3-chome, Chiyoda-k, Tokyo 62, 〒1010062, JP)
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