Title:
IMPRINTING SYSTEM, IMPRINTING METHOD, AND COMPUTER STORAGE MEDIUM
Document Type and Number:
WIPO Patent Application WO/2011/145611
Kind Code:
A1
Abstract:
Disclosed is an imprinting system which comprises: a substrate processing station for forming a first resist film on a substrate; an imprinting station which is connected to the substrate processing station and provided with a plurality of imprinting units that form a second resist film on the substrate, on which the first resist film has been formed, and transfer a transfer pattern to the second resist film so that a predetermined resist pattern is formed on the second resist film; a substrate carrying in/out station for carrying a substrate into or out of the substrate processing station; and a template carrying in/out station for carrying a template into or out of the imprinting station. The imprinting station has a conveyance unit that comprises a substrate conveying arm for conveying a substrate to each imprinting unit and a template conveying arm for conveying a template to each imprinting unit.
Inventors:
TERADA, Shoichi (1-1 Fukuhara, Koshi-sh, Kumamoto 16, 〒8611116, JP)
寺田 正一 (〒16 熊本県合志市福原１－１ 東京エレクトロン九州株式会社内 Kumamoto, 〒8611116, JP)
HIROSHIRO, Koukichi (1-1 Fukuhara, Koshi-sh, Kumamoto 16, 〒8611116, JP)
広城 幸吉 (〒16 熊本県合志市福原１－１ 東京エレクトロン九州株式会社内 Kumamoto, 〒8611116, JP)
寺田 正一 (〒16 熊本県合志市福原１－１ 東京エレクトロン九州株式会社内 Kumamoto, 〒8611116, JP)
HIROSHIRO, Koukichi (1-1 Fukuhara, Koshi-sh, Kumamoto 16, 〒8611116, JP)
広城 幸吉 (〒16 熊本県合志市福原１－１ 東京エレクトロン九州株式会社内 Kumamoto, 〒8611116, JP)
Application Number:
JP2011/061305
Publication Date:
November 24, 2011
Filing Date:
May 17, 2011
Export Citation:
Assignee:
TOKYO ELECTRON LIMITED (3-1 Akasaka 5-chome, Minato-ku Tokyo, 25, 〒1076325, JP)
東京エレクトロン株式会社 (〒25 東京都港区赤坂五丁目３番１号 Tokyo, 〒1076325, JP)
TERADA, Shoichi (1-1 Fukuhara, Koshi-sh, Kumamoto 16, 〒8611116, JP)
寺田 正一 (〒16 熊本県合志市福原１－１ 東京エレクトロン九州株式会社内 Kumamoto, 〒8611116, JP)
HIROSHIRO, Koukichi (1-1 Fukuhara, Koshi-sh, Kumamoto 16, 〒8611116, JP)
東京エレクトロン株式会社 (〒25 東京都港区赤坂五丁目３番１号 Tokyo, 〒1076325, JP)
TERADA, Shoichi (1-1 Fukuhara, Koshi-sh, Kumamoto 16, 〒8611116, JP)
寺田 正一 (〒16 熊本県合志市福原１－１ 東京エレクトロン九州株式会社内 Kumamoto, 〒8611116, JP)
HIROSHIRO, Koukichi (1-1 Fukuhara, Koshi-sh, Kumamoto 16, 〒8611116, JP)
International Classes:
H01L21/027; B29C33/58; B29C33/72; B29C59/02
Attorney, Agent or Firm:
KANEMOTO, Tetsuo et al. (Hazuki International, Kakubari Building 1-20, Sumiyoshi-cho, Shinjuku-k, Tokyo 65, 〒1620065, JP)
Claims: