Title:
IMPROVED BEARING ARRANGEMENT FOR A ROTARY STAGE
Document Type and Number:
WIPO Patent Application WO2003026844
Kind Code:
A3
Abstract:
A rotary stage (40) having a rotary table mounted by bearings (54, 56) defining a rotary table axis of rotation, the rotary table being pre-loaded axially and radially by the bearings engaging a frusto-conical surface (50) encompassing the rotary stage.
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Inventors:
MAURO GEORGE (US)
Application Number:
PCT/US2002/020420
Publication Date:
March 18, 2004
Filing Date:
June 27, 2002
Export Citation:
Assignee:
MAURO GEORGE (US)
International Classes:
F16C17/10; F16C19/54; F16C25/02; F16C25/06; F16M11/08; F16M11/18; (IPC1-7): F16C25/04
Foreign References:
| US3754800A | 1973-08-28 | |||
| US4256312A | 1981-03-17 | |||
| US4351047A | 1982-09-21 | |||
| US5681118A | 1997-10-28 | |||
| US5724934A | 1998-03-10 | |||
| US6461047B2 | 2002-10-08 |
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