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Title:
IMPROVED DETECTION STRUCTURE FOR A Z-AXIS RESONANT ACCELEROMETER
Document Type and Number:
WIPO Patent Application WO/2013/030798
Kind Code:
A8
Abstract:
A detection, structure (1) for a z-axis resonant accelerometer (24) is provided with an inertial mass (2) anchored to a substrate (20) by means of elastic anchorage elements (6) so as to be suspended above the substrate (20) and perform an inertial movement of rotation about a first axis of rotation (A) belonging to a plane (xy) of main extension of the inertial mass (2), in response to an external acceleration (az) acting along a vertical axis (z) transverse with respect to the plane (xy); and a first resonator element (10a) and a second resonator element (10b), which are mechanically coupled to the inertial mass (2) by respective elastic supporting elements (16), which enable a movement of rotation about a second axis of rotation (B) and a third axis of rotation (C), in a resonance condition. In particular, the second axis of rotation (B) and the third axis of rotation (C) are parallel to one another, and are moreover parallel to the first axis of rotation (A) of the inertial mass (2).

Inventors:
COMI, Claudia (Via Mossotti 2, Milano, I-20159, IT)
CORIGLIANO, Alberto (Via Mossotti 2, Milano, I-20159, IT)
ZERBINI, Sarah (Via Favaglie Grandazze 36, Cornaredo, I-20010, IT)
Application Number:
IB2012/054497
Publication Date:
March 07, 2013
Filing Date:
August 31, 2012
Export Citation:
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Assignee:
STMicroelectronics S.r.l. (Via C. Olivetti 2, Agrate Brianza, IT)
POLITECNICO DI MILANO (Piazza Leonardo da Vinci 32, Milano, IT)
COMI, Claudia (Via Mossotti 2, Milano, I-20159, IT)
CORIGLIANO, Alberto (Via Mossotti 2, Milano, I-20159, IT)
ZERBINI, Sarah (Via Favaglie Grandazze 36, Cornaredo, I-20010, IT)
International Classes:
G01P15/097
Attorney, Agent or Firm:
JORIO, Paolo et al. (STUDIO TORTA S.p.A, Via Viotti 9, Torino, I-10121, IT)
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