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Patent Searching and Data


Title:
IMPROVED MEMS DEVICE
Document Type and Number:
WIPO Patent Application WO2006007042
Kind Code:
A3
Abstract:
A MEMS device having a support frame (44) positioned on a substrate (34) surrounding a first electrode (30). A rigid flange portion (48) at the top of the support frame is closely space from, and is connected to, a second electrode (31) by relatively short spring members (50). RF conductors (52, 53) connected to respective first and second electrodes complete an RF switch. A dielectric layer (38) on the first electrode forms a capacitive type device and includes an electrostatic shield layer (40) on its surface. This electrostatic shield layer is connected to ground by a multi megohm bleeder resistance (60).

Inventors:
NATHANSON HARVEY C (US)
KIRBY CHRISTOPHER (US)
TRANCHINI ROBERT (US)
YOUNG ROBERT M (US)
Application Number:
US2005015483W
Publication Date:
April 06, 2006
Filing Date:
May 04, 2005
Export Citation:
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Assignee:
NORTHROP GRUMMAN CORP (US)
NATHANSON HARVEY C (US)
KIRBY CHRISTOPHER (US)
TRANCHINI ROBERT (US)
YOUNG ROBERT M (US)
International Classes:
H01H57/00; H01H51/22
Foreign References:
US6486425B22002-11-26
US6628183B22003-09-30
US6396372B12002-05-28
US5673785A1997-10-07
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