Title:
IN-LINE TYPE FILM FORMING APPARATUS, METHOD FOR MANUFACTURING MAGNETIC RECORDING MEDIUM, AND GATE VALVE
Document Type and Number:
WIPO Patent Application WO/2011/074415
Kind Code:
A1
Abstract:
Disclosed is an in-line type film forming apparatus wherein opening and closing operations of a gate valve can be performed at a high speed, while suppressing generation of vibration due to the opening and closing operations of the gate valve. In the in-line type film forming apparatus, just before a piston (114) in a cylinder (115) reaches the end portion in one direction, air is released using only a second flow adjustment valve (117b) by fully closing a second opening/closing valve (117a), and just before the piston (114) in the cylinder (115) reaches the end portion in the other direction, air is released using only a first flow adjustment valve (116b) by fully closing a first opening/closing valve (116a). Thus, a shock due to contact of the end portions of the cylinder (115) with the piston (114) is relaxed, and the generation of the vibration can be suppressed.
Inventors:
TSUNODA YUKITAKA (JP)
UENO SATORU (JP)
UENO SATORU (JP)
Application Number:
PCT/JP2010/071469
Publication Date:
June 23, 2011
Filing Date:
December 01, 2010
Export Citation:
Assignee:
SHOWA DENKO KK (JP)
TSUNODA YUKITAKA (JP)
UENO SATORU (JP)
TSUNODA YUKITAKA (JP)
UENO SATORU (JP)
International Classes:
C23C14/34; F16K3/18; G11B5/85; G11B5/851
Foreign References:
| JP2000227166A | 2000-08-15 | |||
| JPH11190439A | 1999-07-13 | |||
| JP2009115242A | 2009-05-28 | |||
| JP2004257527A | 2004-09-16 | |||
| JP2006097849A | 2006-04-13 | |||
| JPH11182699A | 1999-07-06 | |||
| JP2009191924A | 2009-08-27 |
Attorney, Agent or Firm:
SHIGA Masatake et al. (JP)
Masatake Shiga (JP)
Masatake Shiga (JP)
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