Title:
IN-SITU PLASMA/LASER HYBRID SCHEME
Document Type and Number:
WIPO Patent Application WO/2010/127344
Kind Code:
A3
Abstract:
A method and apparatus for forming layers on a target. The apparatus and method employ a direct current plasma apparatus to form at least one layer using a plasma jet containing precursors. In some embodiments, the direct current plasma apparatus utilizes axial injection of the precursors through the cathode (in an upstream and/or downstream configuration) and/or downstream of the anode. In some embodiments, the direct current plasma apparatus can comprise a laser source for remelting the layer using a laser beam to achieve insitu densification thereof.
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Inventors:
MOHANTY PRAVANSU S (US)
MOROZ NICHOLAS ANTON (US)
MOROZ NICHOLAS ANTON (US)
Application Number:
PCT/US2010/033383
Publication Date:
January 13, 2011
Filing Date:
May 03, 2010
Export Citation:
Assignee:
UNIV MICHIGAN (US)
MOHANTY PRAVANSU S (US)
MOROZ NICHOLAS ANTON (US)
MOHANTY PRAVANSU S (US)
MOROZ NICHOLAS ANTON (US)
International Classes:
H05H1/24; G21K5/00; H05G2/00
Foreign References:
JPH06272012A | 1994-09-27 | |||
JPH08243756A | 1996-09-24 | |||
JPH07316774A | 1995-12-05 | |||
US5298714A | 1994-03-29 |
Other References:
See also references of EP 2425685A4
Attorney, Agent or Firm:
SNYDER, Jeffrey L. et al. (DICKEY & PIERCE P.L.C.,P.O. Box 82, Bloomfield Hills Michigan, US)
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