Title:
IN-SITU MULTICHANNEL IMAGING QUALITY DETECTION DEVICE AND METHOD FOR MASK ALIGNER
Document Type and Number:
WIPO Patent Application WO/2016/201788
Kind Code:
A1
Abstract:
An in-situ multichannel imaging quality detection device and method for a mask aligner. The device comprises a light source (1) of the mask aligner, a lighting system (2), a mask table (4), a projecting lens (5), a workbench (7),and a computer (8), and also comprises a object plane grating plate (3) and a wave aberration sensor (6). By using the device, imaging quality, related to wave aberration, distortion and field curvature, of the mask aligner is detected in situ, thereby increasing the number of parallel channels and the detection speed of the imaging quality detection.
Inventors:
TANG FENG (CN)
LI JIE (CN)
WANG XIANGZHAO (CN)
FENG PENG (CN)
XU SHIFU (CN)
LU YUNJUN (CN)
LI JIE (CN)
WANG XIANGZHAO (CN)
FENG PENG (CN)
XU SHIFU (CN)
LU YUNJUN (CN)
Application Number:
PCT/CN2015/088311
Publication Date:
December 22, 2016
Filing Date:
August 27, 2015
Export Citation:
Assignee:
SHANGHAI INST OPTICS & FINE MECH CAS (CN)
International Classes:
G03F7/20; G01M11/02
Foreign References:
| CN102608870A | 2012-07-25 | |||
| CN1465968A | 2004-01-07 | |||
| CN102681365A | 2012-09-19 | |||
| CN102681358A | 2012-09-19 | |||
| JP2010206033A | 2010-09-16 |
Attorney, Agent or Firm:
SHANGHAI XIN TIAN PATENT AGENCY CO., LTD. (CN)
上海新天专利代理有限公司 (CN)
上海新天专利代理有限公司 (CN)
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