Title:
INDICATOR FOR DETECTION OF PLASMA PROCESSING
Document Type and Number:
WIPO Patent Application WO/2016/059988
Kind Code:
A1
Abstract:
[Problem] To provide an indicator for the detection of plasma processing that avoids (or prevents) the generation of minute fiber pieces and colored pigment in a blown powder state from a substrate during plasma processing and is not influenced by the chromaticity of a measurement location during color measurement after plasma processing. [Solution] An indicator for the detection of plasma processing in which a part or the entirety of the surface of a substrate is at least laminated with a color changing layer that changes color in a plasma processing atmosphere, said indicator being characterized in that (1) the substrate is a transparent synthetic resin substrate and (2) the rear surface of the substrate has a colored layer.
Inventors:
MORI MARIMO (JP)
Application Number:
PCT/JP2015/078128
Publication Date:
April 21, 2016
Filing Date:
October 05, 2015
Export Citation:
Assignee:
SAKURA COLOR PROD CORP (JP)
International Classes:
G01N31/22; A61L2/28; B32B7/02
Domestic Patent References:
| WO2013129473A1 | 2013-09-06 |
Foreign References:
| JP2013098196A | 2013-05-20 | |||
| JPH0610866U | 1994-02-10 | |||
| JP2003519777A | 2003-06-24 | |||
| JP2012078203A | 2012-04-19 | |||
| JP2003515744A | 2003-05-07 |
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