Title:
INDIUM OXIDE-BASED ELECTRICALLY CONDUCTIVE TRANSPARENT FILM, AND PROCESS FOR PRODUCTION THEREOF
Document Type and Number:
WIPO Patent Application WO/2010/116981
Kind Code:
A1
Abstract:
Disclosed is an electrically conductive transparent film which can be produced in the form of an amorphous film that can be patterned easily by weak acid etching and can be crystallized easily, wherein the crystallized film has a low resistivity and a high transmissivity.
The film is produced in the form of an amorphous film using a sputtering target that comprises a sintered oxide material comprising indium oxide and optionally tin, and additionally comprising at least one additive element selected from the group consisting of Sr, Li, La, Ca, Mg and Y, under conditions where the partial pressure of water is 1.0 × 10-4 to 1.0 × 10-1 Pa inclusive.
Inventors:
TAKAHASHI Seiichiro (MITSUI MINING & SMELTING CO. LTD. 1333-2, Haraichi, Ageo-sh, Saitama 21, 〒3620021, JP)
高橋 誠一郎 (〒21 埼玉県上尾市原市１３３３－２ 三井金属鉱業株式会社 総合研究所内 Saitama, 〒3620021, JP)
MIYASHITA Norihiko (MITSUI MINING & SMELTING CO. LTD. 1333-2, Haraichi, Ageo-sh, Saitama 21, 〒3620021, JP)
高橋 誠一郎 (〒21 埼玉県上尾市原市１３３３－２ 三井金属鉱業株式会社 総合研究所内 Saitama, 〒3620021, JP)
MIYASHITA Norihiko (MITSUI MINING & SMELTING CO. LTD. 1333-2, Haraichi, Ageo-sh, Saitama 21, 〒3620021, JP)
Application Number:
JP2010/056195
Publication Date:
October 14, 2010
Filing Date:
April 06, 2010
Export Citation:
Assignee:
MITSUI MINING & SMELTING CO., LTD. (1-11-1, Osaki Shinagawa-k, Tokyo 84, 〒1418584, JP)
三井金属鉱業株式会社 (〒84 東京都品川区大崎一丁目１１番１号 Tokyo, 〒1418584, JP)
TAKAHASHI Seiichiro (MITSUI MINING & SMELTING CO. LTD. 1333-2, Haraichi, Ageo-sh, Saitama 21, 〒3620021, JP)
高橋 誠一郎 (〒21 埼玉県上尾市原市１３３３－２ 三井金属鉱業株式会社 総合研究所内 Saitama, 〒3620021, JP)
三井金属鉱業株式会社 (〒84 東京都品川区大崎一丁目１１番１号 Tokyo, 〒1418584, JP)
TAKAHASHI Seiichiro (MITSUI MINING & SMELTING CO. LTD. 1333-2, Haraichi, Ageo-sh, Saitama 21, 〒3620021, JP)
高橋 誠一郎 (〒21 埼玉県上尾市原市１３３３－２ 三井金属鉱業株式会社 総合研究所内 Saitama, 〒3620021, JP)
International Classes:
C23C14/08; C23C14/34; H01B5/14; H01B13/00
Attorney, Agent or Firm:
KURIHARA Hiroyuki et al. (Kurihara International Patent Office, Iwasaki Bldg. 6F 3-15, Hiroo 1-chome, Shibuya-k, Tokyo 12, 〒1500012, JP)
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