Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
INDUCTIVE COUPLED COIL AND INDUCTIVE COUPLED PLASMA DEVICE USING THE SAME
Document Type and Number:
WIPO Patent Application WO/2008/028372
Kind Code:
A1
Abstract:
An inductive coupled coil or an inductive coupled plasma device using the same comprises an internal coil and an exterior coil. The internal coil and the exterior coil are independent and are in coaxial alignment. The internal coil is consist of several independent internal sub-coils nested each other that is the same in structure, and the several independent internal sub-coils are arranged symmetrically respect to an axes. The exterior coil is consist of several independent exterior sub-coils nested each other that is the same in structure, and the several independent exterior sub-coils are arranged symmetrically respect to an axes. The inductive coupled coil is located on the reaction chamber of the inductive coupled plasma device and is connected to a RF power. It can make the plasma distribute uniformly on the chip in the reaction chamber so that the difference in chemical reaction rate on the surface of the chip is small and the quality of the etched chip is improved. They can be applied in a semiconductor chip process device and other devices.

Inventors:
SONG, Qiaoli (No.1 East Jiuxianqiao Road, Chaoyang District, Beijing 6, 100016, CN)
宋巧丽 (中国北京市朝阳区酒仙桥东路1号M5楼南二层, Beijing 6, 100016, CN)
Application Number:
CN2007/000309
Publication Date:
March 13, 2008
Filing Date:
January 26, 2007
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
BEIJING NMC CO., LTD. (No.1 East Jiuxianqiao Road, Chaoyang District, Beijing 6, 100016, CN)
北京北方微电子基地设备工艺研究中心有限责任公司 (中国北京市朝阳区酒仙桥东路1号M5楼南二层, Beijing 6, 100016, CN)
SONG, Qiaoli (No.1 East Jiuxianqiao Road, Chaoyang District, Beijing 6, 100016, CN)
International Classes:
H01F5/00; H01F38/14
Foreign References:
US6480086B12002-11-12
US20020186114A12002-12-12
CN1812010A2006-08-02
Attorney, Agent or Firm:
TEE & HOWE INTELLECTUAL PROPERTY ATTORNEY (CHEN, YuanRoom 718, Beijing Capital Times Square, 88 Xichang'an Avenue, Xicheng District, Beijing 1, 100031, CN)
Download PDF: