Title:
INDUCTIVELY COUPLED PLASMA REACTOR AND WIRE STRUCTURE FOR ANTENNA COIL OF INDUCTIVELY COUPLED PLASMA REACTOR
Document Type and Number:
WIPO Patent Application WO/2021/230518
Kind Code:
A1
Abstract:
Provided according to the present invention is an inductively coupled plasma reactor comprising: a reaction chamber providing a plasma reaction space; a ferrite core arranged to surround the plasma reaction space; and an antenna coil formed by winding a thin band-shaped wire structure on the ferrite core, wherein the wire structure comprises a plurality of electrically conductive wires and a sheath made of a flexible material and covering the plurality of electrically conductive wires.
Inventors:
BAE JIN HO (KR)
KIM MIN JAE (KR)
SIM GEON BO (KR)
KIM MIN JAE (KR)
SIM GEON BO (KR)
Application Number:
PCT/KR2021/005042
Publication Date:
November 18, 2021
Filing Date:
April 21, 2021
Export Citation:
Assignee:
LOT CES CO LTD (KR)
LOT VACUUM CO LTD (KR)
LOT VACUUM CO LTD (KR)
International Classes:
H01J37/32; H01Q1/26; H05H1/46
Foreign References:
| KR20160138531A | 2016-12-05 | |||
| US20180099149A1 | 2018-04-12 | |||
| KR20190019651A | 2019-02-27 | |||
| US20020092619A1 | 2002-07-18 | |||
| KR20040026776A | 2004-04-01 |
Attorney, Agent or Firm:
JEON, Yong Joon (KR)
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