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Patent Searching and Data


Title:
INDUCTOR ELEMENT
Document Type and Number:
WIPO Patent Application WO/2018/122949
Kind Code:
A1
Abstract:
An inductor element (1) is provided with a semiconductor substrate (2), an inductor (3) composed of a wire layer in a spiral shape and disposed on the semiconductor substrate (2), and a shield (4) composed of a conductive layer in the same spiral shape as the wire layer of the inductor (3) and disposed along the inductor (3) between a region immediately below the inductor (3) and the semiconductor substrate (2).

Inventors:
HAGIWARA TATSUYA (JP)
FUJIWARA TAKANOBU (JP)
SHIMOZAWA MITSUHIRO (JP)
Application Number:
PCT/JP2016/088860
Publication Date:
July 05, 2018
Filing Date:
December 27, 2016
Export Citation:
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Assignee:
MITSUBISHI ELECTRIC CORP (JP)
International Classes:
H01L21/822; H01F27/36; H01L27/04
Foreign References:
JP2011518433A2011-06-23
JP2011035409A2011-02-17
JP2007019071A2007-01-25
JP2010192500A2010-09-02
JP2006310533A2006-11-09
Attorney, Agent or Firm:
TAZAWA, Hideaki et al. (JP)
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