Title:
INDUSTRIAL PRINTING ALIGNMENT METHOD FOR CRYSTALLINE SILICON SELECTIVE EMITTER
Document Type and Number:
WIPO Patent Application WO/2019/205631
Kind Code:
A1
Abstract:
Disclosed by the present invention is an industrial printing alignment method for a crystalline silicon selective emitter, comprising the following steps: step 1: silicon wafer pre-treatment; step 2: P-N junction preparation; step 3: SE laser doping; step 4: MARK point preparation: adjusting laser parameters such that laser marking energy of a MARK point in a laser preparation process must be higher than SE laser doping energy; step 5: silicon wafer re-treatment; step 6: back-face silk screen printing; step 7: front-face alignment silk screen printing; step 8: sintering testing. The present invention performs two modification methods on a existing laser MARK point of SE technology, wherein laser marking energy of a new MARK point in a laser process must be higher than laser doping line energy, such that the chromaticity and morphology of a laser area is significantly different from that of a non-laser area. At the same time, a square MARK point is punched out by a square laser spot to eliminate edge irregularity, which is beneficial to the naked eye in confirming and observing whether the offset of a machine after printing exceeds a standard amount and the offset direction, and is thus very worthy of promotion.
Inventors:
YANG LEI (CN)
ZHANG GUANLUN (CN)
WU JUNMIN (CN)
CHANG QING (CN)
HONG BUSHUANG (CN)
WANG LAN (CN)
ZHANG PENG (CN)
ZHANG GUANLUN (CN)
WU JUNMIN (CN)
CHANG QING (CN)
HONG BUSHUANG (CN)
WANG LAN (CN)
ZHANG PENG (CN)
Application Number:
PCT/CN2018/118252
Publication Date:
October 31, 2019
Filing Date:
November 29, 2018
Export Citation:
Assignee:
TONGWEI SOLAR ENERGY HEFEI CO LTD (CN)
International Classes:
H01L31/0224; H01L31/18
Foreign References:
| CN108493267A | 2018-09-04 | |||
| CN107863419A | 2018-03-30 | |||
| CN102779894A | 2012-11-14 | |||
| CN105326161A | 2016-02-17 | |||
| CN102145602A | 2011-08-10 | |||
| US8759139B2 | 2014-06-24 |
Attorney, Agent or Firm:
KUNMING HEZHONG ZHIXIN INTELLECTUAL PROPERTY OFFICE (CN)
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