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Patent Searching and Data

Document Type and Number:
WIPO Patent Application WO/2018/021268
Kind Code:
An industrial robot 1 that comprises a common arm 8 to which base end sides of two arms 6, 7 are rotatably coupled. Joint parts 16, 17 that couple the arms 6, 7 and the common arm 8 have arranged thereat: rotary shafts that are fixed to the base end sides the arms 6, 7; bearings that rotatably support the rotary shafts; and magnetic fluid seals that are arranged at outer circumferential sides of the rotary shafts. The common arm 8 comprises: a base end part 22 that is coupled to a main body part 9; two tip end parts 23, 24 that hold the bearings and the magnetic fluid seals; and two coupling parts 25, 26 that link the base end part 22 to each of the tip end parts 23, 24. The base end part 22, the tip end parts 23, 24, and the coupling parts 25, 26 are formed as separate bodies. The industrial robot 1 can thereby easily move the common arm 8 into a vacuum chamber and can easily manipulate the common arm 8 inside the vacuum chamber.

YAZAWA, Takayuki (5329 Shimosuwa-machi, Suwa-gu, Nagano 11, 〒3938511, JP)
TAKASE, Yosuke (5329 Shimosuwa-machi, Suwa-gu, Nagano 11, 〒3938511, JP)
Application Number:
Publication Date:
February 01, 2018
Filing Date:
July 25, 2017
Export Citation:
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NIDEC SANKYO CORPORATION (5329, Shimosuwa-machi Suwa-gu, Nagano 11, 〒3938511, JP)
International Classes:
B25J9/06; H01L21/677; B65G49/06
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