Title:
INERTIA SENSOR
Document Type and Number:
WIPO Patent Application WO/2010/026843
Kind Code:
A1
Abstract:
Provided is an inertia sensor such as an acceleration sensor which can obtain a high SNR in a small size while having a plurality of ranges. The inertia sensor detects an acceleration inertia force in accordance with a change of an electrostatic capacity of a detection unit. The inertia sensor includes a plurality of detection units (D1 to D4) having different sensitivities defined by the ratio of the applied inertia force against the physical amount generated from the respective detection units and has a plurality of measurement ranges. Alternatively, when the inertia sensor has N (N is a natural number not smaller than 2) movable units (6a to 6c), the inertia sensor has (N+1) or more measurement ranges.
Inventors:
JEONG HEE-WON (JP)
YAMANAKA KIYOKO (JP)
YAMANAKA KIYOKO (JP)
Application Number:
PCT/JP2009/063421
Publication Date:
March 11, 2010
Filing Date:
July 28, 2009
Export Citation:
Assignee:
HITACHI LTD (JP)
JEONG HEE-WON (JP)
YAMANAKA KIYOKO (JP)
JEONG HEE-WON (JP)
YAMANAKA KIYOKO (JP)
International Classes:
G01P15/125; H01L29/84
Foreign References:
| US20080098815A1 | 2008-05-01 | |||
| JP2004361388A | 2004-12-24 | |||
| JP2007333467A | 2007-12-27 | |||
| JP2008008820A | 2008-01-17 | |||
| JP2004198310A | 2004-07-15 | |||
| JP2008070312A | 2008-03-27 | |||
| JP2008008820A | 2008-01-17 |
Other References:
See also references of EP 2336788A4
Attorney, Agent or Firm:
TSUTSUI, YAMATO (JP)
Tsutsui Daiwa (JP)
Tsutsui Daiwa (JP)
Download PDF:
Previous Patent: ARTICLE STORAGE FACILITY AND METHOD OF OPERATING THE SAME
Next Patent: FUEL CELL SYSTEM
Next Patent: FUEL CELL SYSTEM