Title:
INERTIA SENSOR
Document Type and Number:
WIPO Patent Application WO/2014/115404
Kind Code:
A1
Abstract:
Provided is an inertia sensor that is resistant to the effects of temperature changes or vibrational disturbances in the environment in which the inertia sensor is mounted. According to the present invention, as shown in FIG. 9 for example, and an extension unit (EXU) is furnished to connect to a fastening unit (FU3), this extension unit (EXU) and a third region (P3) constituting part of a mass (MS) are connected by a support beam (BM3) and a support beam (BM4), the support beam (BM3) and the support beam (BM4) being situated on opposite sides with respect to an imaginary line (IL1). In so doing, natural frequencies of unwanted modes caused by rotation or twisting of the mass (MS) can be shifted into a high-frequency band.
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Inventors:
JEONG HEEWON (JP)
YAMANAKA KIYOKO (JP)
HAYASHI MASAHIDE (JP)
YAMANAKA KIYOKO (JP)
HAYASHI MASAHIDE (JP)
Application Number:
PCT/JP2013/080701
Publication Date:
July 31, 2014
Filing Date:
November 13, 2013
Export Citation:
Assignee:
HITACHI AUTOMOTIVE SYSTEMS LTD (JP)
International Classes:
G01P15/125; G01C19/5747; H01L29/84
Other References:
M.DEGAWA ET AL.: "LATERALLY-DRIVEN DEFORMATION- ROBUST MEMS GYROSCOPES WITH THREE SETS OF SYMMETRICALLY ARRANGED FOLDED-BEAM SUSPENSIONS", SOLID-STATE SENSORS,ACTUATORS AND MICROSYSTEMS CONFERENCE, 2009 . TRANSDUCERS 2009. INTERNATIONAL, 21 June 2009 (2009-06-21) - 25 June 2009 (2009-06-25), USA, pages 664 - 667
Attorney, Agent or Firm:
TSUTSUI, YAMATO (JP)
Tsutsui Daiwa (JP)
Tsutsui Daiwa (JP)
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