Title:
INERTIA SENSOR
Document Type and Number:
WIPO Patent Application WO/2017/056697
Kind Code:
A1
Abstract:
Provided is an inertia sensor that can be reduced in size. An inertia sensor having layers 1a, 2a in which detection parts 20, 30 are formed, the inertial sensor being a laminated structure obtained by laminating two or more of the layers.
Inventors:
DEGAWA MUNENORI (JP)
KIKUCHI HIROSHI (JP)
KIKUCHI HIROSHI (JP)
Application Number:
PCT/JP2016/072713
Publication Date:
April 06, 2017
Filing Date:
August 03, 2016
Export Citation:
Assignee:
HITACHI AUTOMOTIVE SYSTEMS LTD (JP)
International Classes:
G01P15/08; B81B3/00; G01C19/5747; G01C19/5783; G01D21/02; G01L9/00; G01P15/125; G01P15/18; H01L29/84
Domestic Patent References:
| WO2014208116A1 | 2014-12-31 |
Other References:
See also references of EP 3358357A4
Attorney, Agent or Firm:
TODA Yuji (JP)
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