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Patent Searching and Data


Title:
INERTIAL-FORCE DETECTION ELEMENT AND INERTIAL-FORCE SENSOR USING SAME
Document Type and Number:
WIPO Patent Application WO/2011/161958
Kind Code:
A1
Abstract:
The disclosed inertial-force detection element has a frame, a flexible part, a support, and a detection unit. The frame has a first surface and a second surface which is opposite the first surface. A hollow region is formed inside the frame, giving the frame an inner edge. The flexible part is provided inside the hollow region in the frame and connected to the inner edge of the frame. The support is bonded to the frame in a bond section and faces either the first surface or the second surface of the frame. The detection unit is provided on the flexible part. A through-hole is provided between the flexible part and the bond section of the frame.

Inventors:
IMANAKA TAKASHI
AIZAWA HIROYUKI
YAMAMOTO KENSAKU
Application Number:
PCT/JP2011/003558
Publication Date:
December 29, 2011
Filing Date:
June 22, 2011
Export Citation:
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Assignee:
PANASONIC CORP (JP)
IMANAKA TAKASHI
AIZAWA HIROYUKI
YAMAMOTO KENSAKU
International Classes:
G01P15/08; G01C19/5614; G01C19/5621; G01C19/5733; G01P15/12; G01P15/125; G01P15/18
Domestic Patent References:
WO2008129865A12008-10-30
WO2011093077A12011-08-04
Foreign References:
JP2005337874A2005-12-08
JPH06345495A1994-12-20
JPH06291334A1994-10-18
JPH06123631A1994-05-06
JP2010008128A2010-01-14
Attorney, Agent or Firm:
NAITO, Hiroki et al. (JP)
Hiroki Naito (JP)
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Claims: