Title:
INERTIAL FORCE SENSOR AND DETECTING ELEMENT USED FOR SAME
Document Type and Number:
WIPO Patent Application WO/2010/092806
Kind Code:
A1
Abstract:
A detecting element for an inertial force sensor has a weight section, an exciting section and a detecting section. The exciting section excites the weight section in the third direction among the first direction, the second direction and the third direction, which are orthogonally intersecting each other. The detecting section outputs signals corresponding to the displacement of the weight section in the first direction and/or the second direction. The resonance frequencies (Fsx, Fsy) in the first direction and the second direction are set higher than the resonance frequency (Fzd) in the third direction.
Inventors:
UEMURA TAKESHI
Application Number:
PCT/JP2010/000815
Publication Date:
August 19, 2010
Filing Date:
February 10, 2010
Export Citation:
Assignee:
PANASONIC CORP (JP)
UEMURA TAKESHI
UEMURA TAKESHI
International Classes:
G01C19/56; G01P15/125
Domestic Patent References:
| WO2008023653A1 | 2008-02-28 |
Foreign References:
| JPH09287956A | 1997-11-04 | |||
| JP2003121156A | 2003-04-23 | |||
| JP2008122263A | 2008-05-29 | |||
| JP2007232710A | 2007-09-13 | |||
| JP2001208546A | 2001-08-03 | |||
| JP2008203070A | 2008-09-04 | |||
| JP2004245605A | 2004-09-02 | |||
| JP2005221361A | 2005-08-18 | |||
| JPH06174739A | 1994-06-24 | |||
| JPH07190782A | 1995-07-28 | |||
| JPH08145683A | 1996-06-07 | |||
| JPH10185582A | 1998-07-14 |
Other References:
See also references of EP 2385343A4
Attorney, Agent or Firm:
NAITO, Hiroki et al. (JP)
Hiroki Naito (JP)
Hiroki Naito (JP)
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