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Patent Searching and Data


Title:
INERTIAL FORCE SENSOR
Document Type and Number:
WIPO Patent Application WO/2013/125295
Kind Code:
A1
Abstract:
In order to provide an inertial force sensor with good sensitivity, an inertial force sensor comprises: a first substrate provided with a first electrode for detecting inertial force and a first stationary part for extracting a signal detected by the first electrode to an external electrode; and a second substrate provided with a vibrator formed at a predetermine distance from the first electrode, a second stationary part in which the vibrator is provided in a hanging manner by beams and which is affixed to the first substrate, and a third stationary part for transmitting the signal detected by the first electrode to the external electrode, the inertial force sensor being configured such that the first substrate and the second substrate are affixed to each other by bonding and electrically continuous through the bonded surfaces.

Inventors:
SUZUKI KENGO (JP)
AONO TAKANORI (JP)
KANAMARU MASATOSHI (JP)
HAYASHI MASAHIDE (JP)
Application Number:
JP2013/051690
Publication Date:
August 29, 2013
Filing Date:
January 28, 2013
Export Citation:
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Assignee:
HITACHI AUTOMOTIVE SYSTEMS, LTD. (2520, Takaba Hitachinaka-sh, Ibaraki 03, 〒3128503, JP)
International Classes:
G01P15/08; G01C19/5783; G01P15/125; H01L29/84
Foreign References:
JP2008528968A
US6308569B1
JP2010122143A
Attorney, Agent or Firm:
INOUE Manabu et al. (6-1, Marunouchi 1-chome, Chiyoda-k, Tokyo 20, 〒1008220, JP)
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Claims: