Title:
INERTIAL SENSOR AND ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/030100
Kind Code:
A1
Abstract:
An inertial sensor and an electronic device. A mechanical structure layer (220) of the inertial sensor comprises a stator (221) and a rotor (222), and a detection electrode (241) is provided on an insulating base substrate (211). By means of driving the rotor (222) to move relative to the stator (221), and by detecting a variation of capacitance, which is formed by the detection electrode (241) and the rotor (222), the motion state of the inertial sensor or the electronic device can be determined. The insulating base substrate (211) and the mechanical structure layer (220) are connected in a sealed manner, so as to wrap a first electrical connector (212) on the insulating base substrate (211), such that electrical connection between components in the inertial sensor can be realized, a sealed connection is implemented and the vacuum degree is increased.
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| WO/2010/072883 | OVERALL MOTION DETERMINATION |
| WO/2006/083267 | SYSTEM FOR INTERFEROMETRIC SENSING |
| WO/2007/093641 | MOTION CAPTURE DEVICE AND ASSOCIATED METHOD |
Inventors:
CHU HUAI YUAN (CN)
JIA MENGRU (CN)
JIA MENGRU (CN)
Application Number:
PCT/CN2022/114309
Publication Date:
March 09, 2023
Filing Date:
August 23, 2022
Export Citation:
Assignee:
HUAWEI TECH CO LTD (CN)
International Classes:
G01C21/16; G01C25/00
Foreign References:
| CN112209332A | 2021-01-12 | |||
| US20160060100A1 | 2016-03-03 | |||
| CN104251920A | 2014-12-31 | |||
| CN111762752A | 2020-10-13 | |||
| CN112093771A | 2020-12-18 | |||
| CN203377207U | 2014-01-01 | |||
| CN105115540A | 2015-12-02 | |||
| US20140227816A1 | 2014-08-14 | |||
| CN202111014475A | 2021-08-31 |
Attorney, Agent or Firm:
LONGSUN LEAD IP LTD. (CN)
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