Title:
INERTIAL SENSOR AND METHOD FOR MANUFACTURING THE SAME
Document Type and Number:
WIPO Patent Application WO/2010/119573
Kind Code:
A1
Abstract:
Disclosed is an inertial sensor having improved reliability, wherein the space in which an inertial sensor such as an acceleration sensor is placed can be set at a pressure higher than the pressure during the sealing process. The inertial sensor comprises a substrate, a movable part formed on the substrate, and a cap member covering and sealing the movable part. The inertial sensor is characterized in that the movable part side of the cap member is coated with a gas-generating material.
Inventors:
YAMANAKA KIYOKO (JP)
JEONG HEEWON (JP)
HATTORI TAKASHI (JP)
GOTO YASUSHI (JP)
JEONG HEEWON (JP)
HATTORI TAKASHI (JP)
GOTO YASUSHI (JP)
Application Number:
PCT/JP2009/057800
Publication Date:
October 21, 2010
Filing Date:
April 17, 2009
Export Citation:
Assignee:
HITACHI LTD (JP)
YAMANAKA KIYOKO (JP)
JEONG HEEWON (JP)
HATTORI TAKASHI (JP)
GOTO YASUSHI (JP)
YAMANAKA KIYOKO (JP)
JEONG HEEWON (JP)
HATTORI TAKASHI (JP)
GOTO YASUSHI (JP)
International Classes:
G01C19/5733; G01C19/5769; G01P15/08; G01P15/125; H01L23/20
Foreign References:
| JP2007059736A | 2007-03-08 | |||
| JP2008182103A | 2008-08-07 | |||
| JP2002005950A | 2002-01-09 | |||
| JP2008501535A | 2008-01-24 | |||
| JP2000100984A | 2000-04-07 | |||
| JP2007214315A | 2007-08-23 | |||
| JP2007012728A | 2007-01-18 | |||
| JP2002005950A | 2002-01-09 | |||
| JP2008501535A | 2008-01-24 | |||
| JP2008182103A | 2008-08-07 |
Other References:
See also references of EP 2375219A4
Attorney, Agent or Firm:
TSUTSUI, YAMATO (JP)
Tsutsui Daiwa (JP)
Tsutsui Daiwa (JP)
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