Title:
INERTIAL SENSOR AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2016/103342
Kind Code:
A1
Abstract:
Provided is a technology whereby sticking of an inertial sensor and an etching damage of the inertial sensor in manufacturing steps can be suppressed. Specifically, in a plan view from the z direction, each of a plurality of protection units PU includes an opening OP corresponding to each of the protection units PU. Reflecting the configuration, for instance, the width L1 of the protection units PU, said width being in the x direction, is set larger than the opening dimension L3 of the opening OP, said opening dimension being in the x direction, and a non-overlapping region NOR not overlapping the opening OP is formed in each of the protection units PU.
Inventors:
SHIOTA TAKASHI (JP)
SAKUMA NORIYUKI (JP)
ISOBE ATSUSHI (JP)
TAKUBO CHISAKI (JP)
KAMADA YUUDAI (JP)
SAKUMA NORIYUKI (JP)
ISOBE ATSUSHI (JP)
TAKUBO CHISAKI (JP)
KAMADA YUUDAI (JP)
Application Number:
PCT/JP2014/084058
Publication Date:
June 30, 2016
Filing Date:
December 24, 2014
Export Citation:
Assignee:
HITACHI LTD (JP)
International Classes:
G01P15/125; G01P15/08; G01P15/13
Domestic Patent References:
| WO2000042666A1 | 2000-07-20 | |||
| WO2002103368A1 | 2002-12-27 |
Foreign References:
| JPH11186566A | 1999-07-09 | |||
| JP2002521695A | 2002-07-16 |
Attorney, Agent or Firm:
TSUTSUI, YAMATO (JP)
Tsutsui Daiwa (JP)
Tsutsui Daiwa (JP)
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