Title:
INFRARED DETECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2013/190793
Kind Code:
A1
Abstract:
An infrared detection device comprises a substrate and a thermal photodetection element. The substrate comprises a recessed portion, and a frame portion located around the recessed portion. The thermal photodetection element comprises a leg portion and a detection portion, and the leg portion is connected onto the frame portion such that the detection portion is located on the recessed portion. Further, the thermal photodetection element comprises an intermediate layer provided on the substrate, a first electrode layer provided on the intermediate layer, a detection layer provided on the first electrode layer, and a second electrode layer provided on the detection layer. The linear thermal expansion coefficient of the substrate is larger than the linear thermal expansion coefficient of the detection layer, and the linear thermal expansion coefficient of the intermediate layer becomes smaller from the substrate toward the first electrode layer.
Inventors:
NODA TOSHINARI
Application Number:
PCT/JP2013/003596
Publication Date:
December 27, 2013
Filing Date:
June 07, 2013
Export Citation:
Assignee:
PANASONIC CORP (JP)
International Classes:
H01L37/02; G01J1/02
Foreign References:
| JP2002214038A | 2002-07-31 | |||
| JPH09288010A | 1997-11-04 | |||
| JPH0686036U | 1994-12-13 | |||
| JPH05312642A | 1993-11-22 | |||
| JP2012002635A | 2012-01-05 |
Attorney, Agent or Firm:
NAITO, Hiroki et al. (JP)
Hiroki Naito (JP)
Hiroki Naito (JP)
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