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Title:
INFRARED HEATING LAMP TUBE DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/114233
Kind Code:
A1
Abstract:
An infrared heating lamp tube device, comprising an installation bottom plate (1) and multiple infrared heating lamp tubes (2) disposed on the installation bottom plate (1). The multiple infrared heating lamp tubes (2) are radially arranged in a circumference direction around the center of the installation bottom plate (1), and the extension line of each infrared heating lamp tube (2) points to the center of the installation bottom plate (1). According to the infrared heating lamp tube device, the infrared heating lamp tubes (2) are radially arranged in the circumference direction around the center of the installation bottom plate (1), so that better temperature uniformity control can be achieved, and higher process uniformity requirements are satisfied.

Inventors:
DONG, Zhiqing (15 Hongfu Industry Park, Beiqijia Town Changping District, Beijing 9, 102209, CN)
Application Number:
CN2018/092240
Publication Date:
June 20, 2019
Filing Date:
June 21, 2018
Export Citation:
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Assignee:
BEIJING CHUANGYU TECHNOLOGY CO., LTD. (Room A129-1, Zhongxing Road No.10 Science and Technology Park, Changping District, Beijing 0, 102200, CN)
International Classes:
C23C16/48; C23C16/46; C30B25/10; F27D11/00; H01L21/67
Foreign References:
CN107841728A2018-03-27
US20090101633A12009-04-23
CN105706225A2016-06-22
EP0476307B11998-12-23
Attorney, Agent or Firm:
CN-KNOWHOW INTELLECTUAL PROPERTY AGENT LIMITED (18th Floor, Tower B CEC Plaza, No. 3 Dan Ling Street, Haidian District, Beijing 0, 100080, CN)
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