Title:
INFRARED MICROBOLOMETER DETECTOR, DESIGN METHOD AND MANUFACTURING METHOD THEREFOR, AND SYSTEM
Document Type and Number:
WIPO Patent Application WO/2024/050677
Kind Code:
A1
Abstract:
An infrared microbolometer detector (100), a design method and manufacturing method therefor, and a system. The infrared microbolometer detector comprises: a first substrate, a detector readout circuit (106), a microbolometer micro-electromechanical system structure (105), and a pixel-level metasurface layer (102). The pixel-level metasurface layer (102) comprises a plurality of pixel-level metasurface minimum units (304), and the size M of each of the pixel-level metasurface minimum units (304) meets the following condition: M<λ/2nmeta, wherein λ is the wavelength of incident light, and nmeta is the refractive index of the pixel-level metasurface layer (102). The size of each pixel-level metasurface minimum unit (304) is smaller than the wavelength of incident light, incident light can therefore be finely distinguished, and the distinguished incident light is converged into the specific microbolometer micro-electromechanical system structure (105), so as to facilitate the detector readout circuit (106) to perform reading, and a finer infrared image is finally obtained.
Inventors:
HUANG DONGQI (CN)
Application Number:
PCT/CN2022/117137
Publication Date:
March 14, 2024
Filing Date:
September 06, 2022
Export Citation:
Assignee:
HUANG DONGQI (CN)
International Classes:
G01J5/20; G01J5/08
Foreign References:
| CN114739519A | 2022-07-12 | |||
| CN111693466A | 2020-09-22 | |||
| CN114167604A | 2022-03-11 | |||
| US20200025619A1 | 2020-01-23 | |||
| CN114072646A | 2022-02-18 | |||
| CN110118605A | 2019-08-13 | |||
| CN110349946A | 2019-10-18 | |||
| CN114967161A | 2022-08-30 |
Attorney, Agent or Firm:
UNITALEN ATTORNEYS AT LAW CO., LTD. (CN)
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