Title:
INFRARED RAY IMAGING ELEMENT AND INFRARED RAY IMAGING DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/121706
Kind Code:
A1
Abstract:
Disclosed are an infrared ray imaging element and an infrared ray imaging device, both of which can reduce noises. Specifically disclosed are multiple detector pixels which are arranged in a matrix state on a semiconductor substrate and can detect an incidence infrared ray. Each of the detector pixels comprises: a first thermoelectric conversion section which comprises a first infrared ray absorption film capable of absorbing the incidence infrared ray and converting the absorbed incidence infrared ray into heat and a first thermoelectric conversion element capable of converting the heat converted by the first infrared ray absorption film into an electric signal; multiple detector pixels (12); a second thermoelectric conversion section which comprises a second infrared ray absorption film arranged on the semiconductor substrate and capable of absorbing the incidence infrared ray and converting the absorbed incidence infrared ray into heat and a second thermoelectric conversion element capable of converting the heat converted by the second infrared ray absorption film into an electric signal; and a first parasol section (210) which comprises a third infrared ray absorption film arranged apart from the second thermoelectric conversion section so as to cover the second thermoelectric conversion section and capable of absorbing the incidence infrared ray and a joint section arranged on the semiconductor substrate and capable of joining the third infrared ray absorption film to the semiconductor substrate.
Inventors:
HONDA, Hiroto (Toshiba Corporation 1-1, Shibaura 1-chome, Minato-k, Tokyo 01, 〒1058001, JP)
本多 浩大 (〒01 東京都港区芝浦一丁目１番１号 株式会社 東芝 知的財産部内 Tokyo, 〒1058001, JP)
TAKEMURA, Yasuo (5-26-17, Kugahara, Ota-k, Tokyo 85, 〒1460085, JP)
竹村 裕夫 (〒85 東京都大田区久が原５－２６－１７ 株式会社 オクト映像研究所内 Tokyo, 〒1460085, JP)
IIDA, Yoshinori (Toshiba Corporation 1-1, Shibaura 1-chome, Minato-k, Tokyo 01, 〒1058001, JP)
飯田 義典 (〒01 東京都港区芝浦一丁目１番１号 株式会社 東芝 知的財産部内 Tokyo, 〒1058001, JP)
本多 浩大 (〒01 東京都港区芝浦一丁目１番１号 株式会社 東芝 知的財産部内 Tokyo, 〒1058001, JP)
TAKEMURA, Yasuo (5-26-17, Kugahara, Ota-k, Tokyo 85, 〒1460085, JP)
竹村 裕夫 (〒85 東京都大田区久が原５－２６－１７ 株式会社 オクト映像研究所内 Tokyo, 〒1460085, JP)
IIDA, Yoshinori (Toshiba Corporation 1-1, Shibaura 1-chome, Minato-k, Tokyo 01, 〒1058001, JP)
飯田 義典 (〒01 東京都港区芝浦一丁目１番１号 株式会社 東芝 知的財産部内 Tokyo, 〒1058001, JP)
Application Number:
JP2010/055587
Publication Date:
October 06, 2011
Filing Date:
March 29, 2010
Export Citation:
Assignee:
KABUSHIKI KAISHA TOSHIBA (1-1 Shibaura 1-chome, Minato-ku Tokyo, 01, 〒1058001, JP)
株式会社 東芝 (〒01 東京都港区芝浦一丁目１番１号 Tokyo, 〒1058001, JP)
HONDA, Hiroto (Toshiba Corporation 1-1, Shibaura 1-chome, Minato-k, Tokyo 01, 〒1058001, JP)
本多 浩大 (〒01 東京都港区芝浦一丁目１番１号 株式会社 東芝 知的財産部内 Tokyo, 〒1058001, JP)
TAKEMURA, Yasuo (5-26-17, Kugahara, Ota-k, Tokyo 85, 〒1460085, JP)
竹村 裕夫 (〒85 東京都大田区久が原５－２６－１７ 株式会社 オクト映像研究所内 Tokyo, 〒1460085, JP)
IIDA, Yoshinori (Toshiba Corporation 1-1, Shibaura 1-chome, Minato-k, Tokyo 01, 〒1058001, JP)
株式会社 東芝 (〒01 東京都港区芝浦一丁目１番１号 Tokyo, 〒1058001, JP)
HONDA, Hiroto (Toshiba Corporation 1-1, Shibaura 1-chome, Minato-k, Tokyo 01, 〒1058001, JP)
本多 浩大 (〒01 東京都港区芝浦一丁目１番１号 株式会社 東芝 知的財産部内 Tokyo, 〒1058001, JP)
TAKEMURA, Yasuo (5-26-17, Kugahara, Ota-k, Tokyo 85, 〒1460085, JP)
竹村 裕夫 (〒85 東京都大田区久が原５－２６－１７ 株式会社 オクト映像研究所内 Tokyo, 〒1460085, JP)
IIDA, Yoshinori (Toshiba Corporation 1-1, Shibaura 1-chome, Minato-k, Tokyo 01, 〒1058001, JP)
International Classes:
G01J1/02; H01L27/14; H01L35/32; H04N5/33; H04N5/335
Attorney, Agent or Firm:
KATSUNUMA, Hirohito et al. (Kyowa Patent & Law Office, Room 323 Fuji Bldg.,2-3, Marunouchi 3-chom, Chiyoda-ku Tokyo 05, 〒1000005, JP)
Download PDF:
Claims: