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Title:
INFRARED SENSOR CHIP, AND INFRARED SENSOR EMPLOYING SAME
Document Type and Number:
WIPO Patent Application WO/2018/151200
Kind Code:
A1
Abstract:
The objective of the present disclosure is to provide an infrared sensor capable of performing self diagnosis with a high degree of accuracy. In order to achieve this objective, the present disclosure provides an infrared sensor chip provided with: a support substrate (13) including a void portion (12); a bridge portion (14) which extends directly above the void portion (12) and at least one end (15) of which is supported by the support substrate (13); and a thermopile wire (9) which is formed on the bridge portion (14) and links a hot contact point (17) provided on the bridge portion (14) to a cold contact point (18) provided directly above the support substrate (13); wherein the bridge portion (14) includes a break detecting wire (20) routed along the thermopile wire (9), and a heater wire (22) routed in such a way as to pass through a region (21) that is closer to another end (19) of the bridge portion (14) than is the hot contact point (17).

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Inventors:
KAKIMOTO KATSUMI
OKUDO TAKAFUMI
HAGIHARA YOSUKE
MATSUURA AKIRA
Application Number:
PCT/JP2018/005217
Publication Date:
August 23, 2018
Filing Date:
February 15, 2018
Export Citation:
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Assignee:
PANASONIC IP MAN CO LTD (JP)
International Classes:
G01J1/02; G01J1/44; H01L27/144; H01L27/146
Domestic Patent References:
WO2013088903A12013-06-20
WO2014199583A12014-12-18
WO2002075262A12002-09-26
WO2011162346A12011-12-29
Foreign References:
JP2011149823A2011-08-04
JPS629260A1987-01-17
JP2007033154A2007-02-08
JP2010204112A2010-09-16
JP2000353865A2000-12-19
JP2012226021A2012-11-15
JP2000308093A2000-11-02
JP2007134549A2007-05-31
US20100213374A12010-08-26
JP2011027652A2011-02-10
Other References:
See also references of EP 3584550A4
Attorney, Agent or Firm:
HOKUTO PATENT ATTORNEYS OFFICE (JP)
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