Title:
INFRARED SENSOR AND INFRARED SENSOR MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2010/073288
Kind Code:
A1
Abstract:
Provided are an infrared sensor which has improved detection sensitivity and can simply be manufactured with high yield, and an infrared sensor manufacturing method. The infrared sensor has a frame-like substrate part (2) formed as a four-side frame, a projecting base material part (3) formed inside the substrate part (2) and extending in an infrared incident direction, and an infrared detection part (5) provided at least on the lateral face of the upper portion of the base material part (3). The base material part (3) has a grid constitution obtained by composing element base material parts (4) comprising rib-like vertical base material parts (4a) and rib-like transverse base material parts (4b).
Inventors:
FUJIMOTO KENJIRO (JP)
MAEDA TAKANORI (JP)
KAWANO TAKAHIRO (JP)
MAEDA TAKANORI (JP)
KAWANO TAKAHIRO (JP)
Application Number:
PCT/JP2008/003887
Publication Date:
July 01, 2010
Filing Date:
December 22, 2008
Export Citation:
Assignee:
PIONEER CORP (JP)
FUJIMOTO KENJIRO (JP)
MAEDA TAKANORI (JP)
KAWANO TAKAHIRO (JP)
FUJIMOTO KENJIRO (JP)
MAEDA TAKANORI (JP)
KAWANO TAKAHIRO (JP)
International Classes:
G01J1/02; H01L27/14; H01L37/02
Foreign References:
| JPH07190854A | 1995-07-28 | |||
| JP2001356046A | 2001-12-26 | |||
| JPH01100426A | 1989-04-18 | |||
| JPH0829262A | 1996-02-02 | |||
| JPS6296536U | 1987-06-19 | |||
| JP2003004527A | 2003-01-08 |
Attorney, Agent or Firm:
OCHIAI, MINORU (JP)
Minoru Ochiai (JP)
Minoru Ochiai (JP)
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