INFRARED SENSOR AND METHOD FOR MANUFACTURING INFRARED SENSOR

WIPO Patent Application WO/2010/073287

A1

Provided are an infrared sensor capable of achieving improved detection sensitivity and being easily manufactured in high yield and a method for manufacturing the same. The infrared sensor is provided with a substrate (2), a projecting base material section (3) provided in a projecting manner on the substrate (2) and extending in the direction of incidence of infrared light and an infrared detection section (5) provided on the side surface of at least the upper portion of the projecting base material section (3). The projecting base material section (3) is constituted by assembling plural element base material parts (4) composed of plural rib-shaped vertical base material parts (4a) and plural rib-shaped horizontal base material parts (4b) in a grid pattern.

FUJIMOTO, Kenjiro (1-2 Fujimi 6-chome, Tsurugashima-sh, Saitama 88, 35022, JP)
藤本健二郎 (〒88 埼玉県鶴ヶ島市富士見６丁目１番２号パイオニア株式会社 総合研究所内 Saitama, 35022, JP)
MAEDA, Takanori (1-2 Fujimi 6-chome, Tsurugashima-sh, Saitama 88, 35022, JP)

JP2008/003886

July 01, 2010

December 22, 2008

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PIONEER CORPORATION (4-1 Meguro 1-chome, Meguro-ku Tokyo, 54, 15386, JP)
パイオニア株式会社 (〒54 東京都目黒区目黒１丁目４番１号 Tokyo, 15386, JP)
FUJIMOTO, Kenjiro (1-2 Fujimi 6-chome, Tsurugashima-sh, Saitama 88, 35022, JP)
藤本健二郎 (〒88 埼玉県鶴ヶ島市富士見６丁目１番２号パイオニア株式会社 総合研究所内 Saitama, 35022, JP)

G01J1/02; H01L27/14; H01L37/02

OCHIAI, Minoru (8th Floor, Itopia-Hashimoto Building 11-9, Iwamotocho 2-chome, Chiyoda-k, Tokyo 32, 10100, JP)

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