Title:
INFRARED SENSOR USING CARBON NANOTUBES AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2020/158455
Kind Code:
A1
Abstract:
One purpose of this invention is to provide an infrared sensor having a high TCR value and a method for manufacturing the infrared sensor. This infrared sensor comprises a substrate, a first electrode on the substrate, a second electrode that is on the substrate and is removed from the first electrode, and a carbon nanotube layer that is electrically connected to the first electrode and second electrode. The carbon nanotube layer includes more than 66 mass% of semiconductor carbon nanotubes with respect to the total mass of the carbon nanotubes, and 60% or more of the carbon nanotubes included in the carbon nanotube layer have a diameter within the range of 0.6 to 1.5 nm and a length within the range of 100 nm to 5 μm.
Inventors:
YUGE RYOTA (JP)
NARITA KAORU (JP)
TANAKA TOMO (JP)
NARITA KAORU (JP)
TANAKA TOMO (JP)
Application Number:
PCT/JP2020/001503
Publication Date:
August 06, 2020
Filing Date:
January 17, 2020
Export Citation:
Assignee:
NEC CORP (JP)
International Classes:
G01J1/02; C01B32/168; C01B32/172; C01B32/174; H01C7/04; H01L31/00; H01L31/08; H01L35/00; H01L35/22; H01L35/34; H01L37/00; H01L51/00; H01L51/30
Domestic Patent References:
| WO2012049801A1 | 2012-04-19 | |||
| WO2010150808A1 | 2010-12-29 |
Foreign References:
| JP2015049207A | 2015-03-16 | |||
| JP2011166070A | 2011-08-25 | |||
| JP2010163568A | 2010-07-29 | |||
| JP2017001919A | 2017-01-05 |
Attorney, Agent or Firm:
ITO, Katsuhiro (JP)
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