Title:
INFRARED SENSOR
Document Type and Number:
WIPO Patent Application WO/2018/173973
Kind Code:
A1
Abstract:
Provided is an infrared sensor in which it is possible to speed up convergence of a heat balance and improve thermal response. The infrared sensor pertaining to the present invention is provided with: an insulating film 2; a first heat-sensitive element 5A and a second heat-sensitive element 5B provided to one surface of the insulating film; a pair of first wirings 6A formed on one surface of the insulating film; a pair of second wirings 6B formed on one surface of the insulating film; a light-receiving region facing the first heat-sensitive element and provided on the other surface of the insulating film; an infrared reflecting membrane 8 for covering at least the second heat-sensitive element from directly above while avoiding the light-receiving region, the infrared reflecting membrane 8 being formed on the other surface of the insulating film; and a heat-conductive membrane 7 connected to the first heat-sensitive element and formed as a pattern on one surface of the insulating film; the heat-conductive membrane having a thermal coupling part C near a portion of the infrared reflecting membrane.
Inventors:
NAKAMURA KENJI (JP)
TARI KAZUYOSHI (JP)
HIRANO SHINGO (JP)
TARI KAZUYOSHI (JP)
HIRANO SHINGO (JP)
Application Number:
PCT/JP2018/010586
Publication Date:
September 27, 2018
Filing Date:
March 16, 2018
Export Citation:
Assignee:
MITSUBISHI MATERIALS CORP (JP)
International Classes:
G01J1/02; G01J5/10
Foreign References:
| JP2013156235A | 2013-08-15 | |||
| JP2015224964A | 2015-12-14 | |||
| JP2013113732A | 2013-06-10 | |||
| JP2012068115A | 2012-04-05 | |||
| US20150369669A1 | 2015-12-24 | |||
| JP2017134033A | 2017-08-03 | |||
| JP2013160635A | 2013-08-19 |
Other References:
See also references of EP 3605040A4
Attorney, Agent or Firm:
TAKAOKA Ryoichi (JP)
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