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Title:
INFRARED THERMOPILE DETECTOR SYSTEM FOR SEMICONDUCTOR PROCESS MONITORING AND CONTROL
Document Type and Number:
WIPO Patent Application WO2004010462
Kind Code:
A3
Abstract:
A thermopile-based detector (20) for monitoring and/or controlling semiconductor processes, and a method of monitoring and/or controlling semiconductor processes using thermopile-based sensing of conditions in and/or affecting such processes.

Inventors:
ARNO JOSE
Application Number:
PCT/US2003/013937
Publication Date:
November 25, 2004
Filing Date:
May 05, 2003
Export Citation:
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Assignee:
ADVANCED TECH MATERIALS (US)
International Classes:
G01N21/35; C23C16/52; H01L21/00; H01L21/205; (IPC1-7): H01L21/00
Foreign References:
US6348650B12002-02-19
US5834777A1998-11-10
US6469303B12002-10-22
US4935345A1990-06-19
US5589689A1996-12-31
US5047352A1991-09-10
US5650624A1997-07-22
US5721430A1998-02-24
Other References:
See also references of EP 1502289A4
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