Title:
INJECTOR FOR PLASMA MASS FILTER
Document Type and Number:
WIPO Patent Application WO2005076814
Kind Code:
A3
Abstract:
An injection (30) system (10) for introducing feed material (34) into a plasma mass filter (10) includes an injector (30) for producing a jet (32) of feed material (34). For a plasma mass filter (10) having a cylindrical wall (12) that surrounds a plasma chamber (14), the injector (30) is mounted to the outside of wall and oriented to deliver a feed jet (32) into the plasma chamber (14). Specifically, the injector (30) is oriented to deliver a jet (32) that is directed toward a target volume (36) in the chamber that is located substantially on the longitudinal axis defined by the cylindrical wall (12). More specifically, the feed material (34) is injected into the chamber to the target volume (36) along a path that is transverse to the direction of plasma rotation in the chamber. A vaporization energy source (38) can be included to generate and direct an energy beam (40) toward the target volume (36) to vaporize the jet (32) of feed material (34) as the jet (32) arrives at the target volume (36).
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Inventors:
OHKAWA TIHIRO (US)
Application Number:
PCT/US2005/002383
Publication Date:
June 29, 2006
Filing Date:
January 26, 2005
Export Citation:
Assignee:
ARCHIMEDES OPERATING LLC (US)
International Classes:
C23C16/48; B01D17/06; C23C16/50; C23C16/505; C23C16/511; C23C16/513; C23C16/515; C23F1/32; H01L21/3065; C23C16/507
Foreign References:
| US5779802A | 1998-07-14 | |||
| US6444945B1 | 2002-09-03 | |||
| US5776359A | 1998-07-07 |
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