Title:
INORGANIC ALIGNMENT FILM FORMING APPARATUS FOR LCOS DISPLAY
Document Type and Number:
WIPO Patent Application WO/2020/122388
Kind Code:
A1
Abstract:
The present invention relates to an inorganic alignment film forming apparatus for forming an inorganic alignment film on a substrate, the apparatus comprising: a sputtering means; and an ion beam irradiation means for performing surface treatment on an inorganic alignment film formed by the sputtering means, wherein the sputtering means comprises a stage on which a substrate for forming the inorganic alignment film is arranged, at least one sputtering gun, and a sputtering mask arranged between the stage and the sputtering gun, the ion beam irradiation means comprises a stage on which the substrate is arranged, an ion beam emission unit for generating ions and irradiating the substrate with ions, and an ion beam irradiation mask arranged between the stage and the ion beam emission unit, and the sputtering mask and the ion beam irradiation mask have a plurality of inclined opening parts.
Inventors:
LEE KYO WUNG (KR)
KIM SUNG IL (KR)
PARK MAN BOK (KR)
KIM SUNG IL (KR)
PARK MAN BOK (KR)
Application Number:
PCT/KR2019/013169
Publication Date:
June 18, 2020
Filing Date:
October 08, 2019
Export Citation:
Assignee:
VISIONAID INC (KR)
International Classes:
G02F1/1337; G02F1/13; H01L21/02; H01L21/265
Foreign References:
| KR20090105019A | 2009-10-07 | |||
| KR100304913B1 | 2003-07-16 | |||
| JP2006047724A | 2006-02-16 | |||
| KR20070051188A | 2007-05-17 | |||
| KR20130021930A | 2013-03-06 |
Attorney, Agent or Firm:
NEIT INTERNATIONAL PATENT LAW FIRM (KR)
Download PDF:
Previous Patent: ELECTRONIC DEVICE INCLUDING ACOUSTIC MODULE
Next Patent: IMAGE PROCESSING DEVICE AND METHOD FOR OPERATING SAME
Next Patent: IMAGE PROCESSING DEVICE AND METHOD FOR OPERATING SAME