INSPECTING DEVICE AND METHOD

Title:

INSPECTING DEVICE AND METHOD

Document Type and Number:

WIPO Patent Application WO/2018/008070

Kind Code:

A1

Abstract:

An inspecting device (1, 2) includes: an electromagnetic-wave generating unit (11a); an electromagnetic-wave detecting unit (16a); a reflecting part (34, 41) that can reflect an electromagnetic wave; and an adjusting means (20) that causes an electromagnetic wave emitted from the electromagnetic-wave generating unit to be introduced into the electromagnetic-wave detecting unit by way of the reflecting part, not via a subject (90), during a partial period in an inspection period during which the subject is irradiated with the electromagnetic wave and that adjusts a bias voltage applied to the electromagnetic-wave detecting unit on the basis of the detection sensitivity of the electromagnetic-wave detecting unit.

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Inventors:

TANAKA HIROYUKI (JP)

Application Number:

PCT/JP2016/069816

Publication Date:

January 11, 2018

Filing Date:

July 04, 2016

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Assignee:

PIONEER CORP (JP)

International Classes:

G01N21/3581

Foreign References:

JP2014106127A	2014-06-09
JP2015087163A	2015-05-07
JP2015180047A	2015-10-08

Attorney, Agent or Firm:

EGAMI, Tatsuo et al. (JP)

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