Title:
INSPECTION APPARATUS AND REPLACEABLE DOOR FOR A VACUUM CHAMBER OF SUCH AN INSPECTION APPARATUS AND A METHOD FOR OPERATING AN INSPECTION APPARATUS
Document Type and Number:
WIPO Patent Application WO/2012/008836
Kind Code:
A4
Abstract:
An inspection apparatus is provided comprising in combination at least an optical microscope (2, 3, 4) and an ion- or electron microscope (7, 8) equipped with a source (7) for emitting a primary beam (9) of radiation to a sample (10) in a sample holder. The apparatus may comprise a detector (8) for detection of secondary radiation (11) backscattered from the sample and induced by the primary beam. The optical microscope is equipped with an light collecting device (2) to receive in use luminescence light (12) emitted by the sample and to focus it on a photon-detector (4).
Inventors:
KRUIT PIETER (NL)
HOOGENBOOM JACOB PIETER (NL)
ZONNEVYLLE AERNOUT CHRISTIAAN (NL)
HOOGENBOOM JACOB PIETER (NL)
ZONNEVYLLE AERNOUT CHRISTIAAN (NL)
Application Number:
PCT/NL2011/050513
Publication Date:
May 03, 2012
Filing Date:
July 14, 2011
Export Citation:
Assignee:
DELMIC B V (NL)
KRUIT PIETER (NL)
HOOGENBOOM JACOB PIETER (NL)
ZONNEVYLLE AERNOUT CHRISTIAAN (NL)
KRUIT PIETER (NL)
HOOGENBOOM JACOB PIETER (NL)
ZONNEVYLLE AERNOUT CHRISTIAAN (NL)
International Classes:
H01J37/22; G01N21/00; G01N23/225; H01J37/256; H01J37/28
Attorney, Agent or Firm:
DE HOOP, Eric (Dr. Kuyperstraat 6, BB Den Haag, NL)
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