Title:
INSPECTION CONTACT ELEMENT AND INSPECTION JIG
Document Type and Number:
WIPO Patent Application WO/2011/132613
Kind Code:
A1
Abstract:
Provided is a micro contact element which is capable of corresponding to the miniaturization and greater complexity of substrates, which is simplified due to a reduction in the number of components, and which has sufficient contact pressure and stroke, and also provided is an inspection jig which uses this contact element. An inspection contact element having the contact pressure and amount of contraction required for inspection is formed by using notches respectively formed in two conductive cylindrical members having different outer and inner diameters to function as elastic parts respectively, and combining the two cylindrical members in such a way that said elastic parts are arranged in parallel or in series.
Inventors:
OHTA NORIHIRO (JP)
OHMAYU MANABU (JP)
KASUKABE SUSUMU (JP)
OHMAYU MANABU (JP)
KASUKABE SUSUMU (JP)
Application Number:
PCT/JP2011/059411
Publication Date:
October 27, 2011
Filing Date:
April 15, 2011
Export Citation:
Assignee:
NIDEC READ CORP (JP)
OHTA NORIHIRO (JP)
OHMAYU MANABU (JP)
KASUKABE SUSUMU (JP)
OHTA NORIHIRO (JP)
OHMAYU MANABU (JP)
KASUKABE SUSUMU (JP)
International Classes:
G01R1/067; H01L21/66
Foreign References:
| JP2009008579A | 2009-01-15 | |||
| JP2008256362A | 2008-10-23 | |||
| JP2007024664A | 2007-02-01 | |||
| JPH02114470A | 1990-04-26 |
Attorney, Agent or Firm:
KITAMURA, HIDEAKI (JP)
Hideaki Kitamura (JP)
Hideaki Kitamura (JP)
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Claims:
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