Title:
INSPECTION DEVICE, INSPECTION APPARATUS, AND INSPECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2017/169717
Kind Code:
A1
Abstract:
[Problem] To provide: an inspection device that enables light extraction efficiency to be improved and can be produced at low cost; an inspection apparatus equipped with the inspection device; and an inspection method. [Solution] An inspection device (1) provided with a plurality of holes (14) that penetrate from one surface (11) to the other surface (12) of a sheet-like substrate (10), said inspection device (1) comprising: regions (20), each of which contains at least some of the holes (14), has at least a portion of wall members (16), which constitute the inner wall surfaces (14a) of the at least some of the holes (14), comprising alumina; and frame walls (18) comprising aluminum that surround the regions (20) when seen from the one surface (11); wherein a trapping substance that specifically binds with a specific substance is fixed on the inner wall surfaces (14a) of the at least some of the holes (14).
Inventors:
WATANO HIROTAKA (JP)
Application Number:
PCT/JP2017/010100
Publication Date:
October 05, 2017
Filing Date:
March 14, 2017
Export Citation:
Assignee:
FUJIFILM CORP (JP)
International Classes:
G01N33/553; G01N21/64; G01N21/78; G01N33/53
Domestic Patent References:
WO2013179342A1 | 2013-12-05 |
Foreign References:
JP2007163163A | 2007-06-28 | |||
JP2000229228A | 2000-08-22 | |||
JP2005106671A | 2005-04-21 | |||
JP2003066042A | 2003-03-05 | |||
JP2004093152A | 2004-03-25 | |||
JP2010019570A | 2010-01-28 | |||
JP2008076313A | 2008-04-03 |
Attorney, Agent or Firm:
TAIYO, NAKAJIMA & KATO (JP)
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